masking pattern meaning in Chinese
掩模图案
Examples
- Some practical examples for producing mask patterns of micro - lens array are given in the end
最后给出生成微透镜列阵掩模图形的实例。 - When the two layers of sio2 with different refractive index are finished , the designed mask pattern is printed on the film by photolithography . after that , icp is performed for dry etching , then , the waveguide structures are obtained . at present , the rudimental graph of edg has been obtained
两层不同折射率的sio _ 2薄膜制备好之后,经过光刻、等离子体刻蚀( icp )的工艺步骤之后,形成了波导结构,初步制作出了器件的图形。 - The processes include the deposition of the waveguide film , the design and fabrication of the mask pattern , the lithography , the metal coating with a magnetic sputtering , the lift - off process for the metal mask , the dry deep etching by icp , the slicing of the wafer , the polishing of the cutting edge , the fiber - to - waveguide alignment and at last , the performance testing . some edg chip samples are fabricated
对设计好的集成波导器件,本论文设计并试验了器件的制作的全部工艺,包括波导薄膜的沉积,掩模的设计制作,光刻,溅射金属薄膜,剥离法制作金属掩模,干法深刻蚀,硅片切割,端面磨抛,波导对准和性能测试。